Patent · US Active

Apparatus and a method for spectroscopic ellipsometry, in particular infrared spectroscopic ellipsometry

US9383306B2 · kind B2 · utility

3Cited by

1References

22Claims

0Family size

Assignee

UNIVERSITAT STUTTGART · DE

Inventors

Klaus Koerner · Stuttgart, DE
Arnulf Roeseler · Lindow, DE
Daniel Claus · Stuttgart, DE
Wolfgang Osten · Lilienthal, DE

Key dates

Filing date	Nov 10, 2015
Grant date	Jul 5, 2016
Priority date	—
Expiry date	Nov 10, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/213
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Disclosed herein is an apparatus for spectroscopic ellipsometry, preferably for infrared spectroscopic ellipsometry, and a method for spectroscopic ellipsometry employing the apparatus. In some embodiments, the apparatus may comprise a light source (12), a detector (30), a polarizer (40), an analyzer (41), and a measuring probe (10). In one embodiment, the measuring probe may comprise an ATR prism (50) having at least one first surface having at least one measuring portion (M) configured to be brought in optical contact with a measured object (72), and at least one second surface having at least one reflective portion (RX).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.