Mask
US9383639B2 · kind B2 · utility
1Cited by
0References
14Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jul 30, 2014 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Dec 30, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/40
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An embodiment of the present invention discloses a mask. The mask comprises: a substrate; a light transmission area on the substrate; a light shielding area on the substrate, provided with at least two light shielding layers, each of the at least two light shielding layers having a preset mask pattern and being conductive; and one or more connecting wire(s), configured to respectively electrically connect the at least two light shielding layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.