Electromechanical conversion element, liquid drop discharge head and image forming apparatus
US9385298B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2015 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Sep 28, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/501
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An electromechanical conversion element includes a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film. A diffraction peak at a position 2θ at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by θ-2θ measurement in X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.