Compositions for controlled assembly and improved ordering of silicon-containing block copolymers

US9388326B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Damien Montarnal · Paris, FR
• Craig J. Hawker · Los Gatos, US
• Edward J. Kramer · Lompoc, US
• Glenn H. Fredrickson · Lompoc, US

Key dates

• Filing date: Sep 9, 2015
• Grant date: Jul 12, 2016
• Expiry date: Sep 9, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/31144
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention provides compositions and methods for inducing and enhancing order and nanostructures in organosilicon block copolymers compositions by including certain organic additives in such compositions that include one or more moieties comprising a hydrogen bond acceptor or a hydrogen bond donor. Such block copolymer compositions may be used, for example, as a mask for lithographic patterning as is used, for example, during various stages of semiconductor device fabrication.