Organic film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
US9388488B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2011 |
| Grant date | Jul 12, 2016 |
| Priority date | — |
| Expiry date | May 5, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/441
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An organic film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit located at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet spaced apart from the deposition source nozzle unit and having a plurality of patterning slits arranged in a second direction perpendicular to the first direction; a first blocking member between the substrate and the deposition source and movable together with the substrate to be positioned to screen at least a part of the substrate; and a second blocking member between the first blocking member and the substrate and fixedly held relative to the deposition source, wherein the substrate is spaced apart from the organic film deposition apparatus and at least one of the substrate or the organic film deposition apparatus moves relative to the other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.