Optomechanical disk vibratory gyroscopes
US9389079B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 20, 2015 |
| Grant date | Jul 12, 2016 |
| Priority date | — |
| Expiry date | Feb 20, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5691
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated optomechanical disk vibratory gyroscope device includes a mechanical oscillator having a substantially circular structure. The substantially circular structure is supported by a pillar, and mechanically isolated from a surrounding structure by a gap or slot. One or more actuators are coupled to the mechanical oscillator across the gap or slot. Each of the one or more actuators is configured to excite the mechanical oscillator in a driving mode. One or more optomechanical cavities are disposed substantially in a plane defined by the mechanical oscillator. At least one component of the one or more optomechanical cavities is disposed on or in the substantially circular structure. Each of the at least one or more optomechanical cavities configured to measure a displacement of the mechanical oscillator in a sensing mode. A method of manufacture is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.