Method for making an infrared detection device

US9389125B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Jean-Jacques Yon · Saint-Égrève, FR
• Geoffroy Dumont · Paris, FR
• Pierre Imperinetti · Seyssinet-Pariset, FR
• Stephane Pocas · Grenoble, FR

Key dates

• Filing date: Dec 16, 2013
• Grant date: Jul 12, 2016
• Expiry date: Aug 3, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J2005/106
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An infrared detection device including an infrared heat detector and a connection pad each spaced apart from an etching stop layer by a non-zero distance substantially equal relatively to each other, wherein first and second electrically conducting vias are respectively electrically connected to first and second portions of a metal line of a penultimate level of electrical interconnections, and wherein an empty space formed in a first inter-metal dielectric layer surrounds the first electrically conducting via and extends under the infrared heat detector.