Methods for fabricating high aspect ratio probes and deforming high aspect ratio nanopillars and micropillars
US9390936B2 · kind B2 · utility
3Cited by
23References
8Claims
0Family size
Inventors
Key dates
| Filing date | Oct 29, 2014 |
| Grant date | Jul 12, 2016 |
| Priority date | — |
| Expiry date | Oct 29, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T436/25375
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods for fabricating of high aspect ratio probes and deforming micropillars and nanopillars are described. Use of polymers in deforming nanopillars and micropillars is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.