Patent · US Active

CMOS image sensor unit and method for fabricating the same

US9391115B1 · kind B1 · utility

1Cited by
3References
8Claims
0Family size

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Inventors

Key dates

Filing dateJun 16, 2015
Grant dateJul 12, 2016
Priority date
Expiry dateJun 16, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F39/803

Abstract

A CMOS image sensor unit and a method for fabricating the same are described. The image sensor unit includes a photodiode, a transfer gate, a reset gate, a source follower gate, a floating drain region between the transfer gate and the reset gate, and a PIP capacitor. The lower poly-Si electrode of the PIP capacitor is electrically connected with the floating drain region and the source follower gate to also serve as an interconnect between the floating drain region and the source follower gate. The fabrication method includes forming contact plugs on the floating drain region and the source follower gate, and then forming a PIP capacitor whose lower poly-Si electrode is connected with each contact plug.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.