Patent · US Active

Substrate arrangement

US9391147B2 · kind B2 · utility

0Cited by
5References
14Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 30, 2015
Grant dateJul 12, 2016
Priority date
Expiry dateMar 30, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/7624
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A substrate arrangement comprising a substrate having a surface configured to receive, by epitaxy, an epitaxial layer of semiconducting material, the substrate comprising a laminate having a handle layer and a seed layer, the seed layer having a crystal orientation arranged to receive the epitaxial layer and the handle layer having a crystal orientation different to the seed layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.