Mask assembly for deposition
US9394600B2 · kind B2 · utility
3Cited by
1References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 27, 2014 |
| Grant date | Jul 19, 2016 |
| Priority date | — |
| Expiry date | Mar 27, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/042
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A deposition mask assembly includes: a mask in which a deposition pattern is formed and a mask frame fixed to an edge of the mask, an opening being formed at a center of the mask frame. A first surface of the edge of the mask and a first surface of the mask frame adjacent to the opening which face each other are welded to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.