Apparatus and method for sputter-deposited coatings on fluidized particle beds
US9394604B2 · kind B2 · utility
1Cited by
9References
24Claims
0Family size
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Key dates
| Filing date | Apr 15, 2013 |
| Grant date | Jul 19, 2016 |
| Priority date | — |
| Expiry date | Sep 2, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2993
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and an apparatus for producing metal and ceramic coatings on a fluidized bed of particles or fibers are described. The method utilizes a unique apparatus to transfer vibratory motion through a wall of a deposition chamber in order to produce a fluidized bed of particle or fluidized bed of fibers inside the chamber. The method and apparatus are versatile, allowing particles of different shapes, sizes, materials and masses to be fluidized and coated. The fluidization process allows uniform and conformal coatings on particles and fibers. Coatings of pure metals, alloys, or ceramic materials can be produced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.