Method for making topological insulator structure

US9394624B2 · kind B2 · utility

Assignees

• TSINGHUA UNIVERSITY · CN
• INSTITUTE OF PHYSICS, THE CHINESE ACADEMY OF SCIENCES · CN

Inventors

• Qi Xue · Nanjing, CN
• Ke He · Beijing, CN
• Xu-Cun Ma · Beijing, CN
• Xi Chen · Sunnyvale, US
• Li Wang
• Cui-Zu Chang · Beijing, CN
• Xiao Feng · Beijing, CN
• Yao-Yi Li · Beijing, CN
• Jin-Feng Jia · Beijing, CN

Key dates

• Filing date: Oct 16, 2013
• Grant date: Jul 19, 2016
• Expiry date: Sep 6, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N52/85
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method for forming a topological insulator structure is provided. A strontium titanate substrate having a surface (111) is used. The surface (111) of the strontium titanate substrate is cleaned by heat-treating the strontium titanate substrate in the molecular beam epitaxy chamber. The strontium titanate substrate is heated and Bi beam, Sb beam, Cr beam, and Te beam are formed in the molecular beam epitaxy chamber in a controlled ratio achieved by controlling flow rates of the Bi beam, Sb beam, Cr beam, and Te beam. The magnetically doped topological insulator quantum well film is formed on the surface (111) of the strontium titanate substrate. The amount of the hole type charge carriers introduced by the doping with Cr is substantially equal to the amount of the electron type charge carriers introduced by the doping with Bi.