Anti-electrostatic substrate cassette
US9396980B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2014 |
| Grant date | Jul 19, 2016 |
| Priority date | — |
| Expiry date | Apr 7, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65D85/30
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The present invention provides an anti-electrostatic cassette, which mainly comprises at least an electrostatic discharge (ESD) device connected electrically to the carrying frames, which are disposed in the substrate cassette and carry the substrates, and to the handles, which are disposed on the outer sides of the substrate cassette, for forming the conductive path. By means of the contact between the equipment and the two handles of the substrate cassette, the residual static charges on the substrates are conducted to the ground for reducing the residual static charges on the substrates. Consequently, the ESD phenomena in the substrates due to friction can be avoided and hence preventing the damages in the substrates caused by static charges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.