Patent · US Active

Bolometer having frequency detection

US9400218B2 · kind B2 · utility

0Cited by
9References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 23, 2011
Grant dateJul 26, 2016
Priority date
Expiry dateJun 13, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F71/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A bolometer including: at least one electromechanical microsystem or nanosystem, the microsystem or nanosystem including a support and a mobile mass hung from beams above the support, the mobile mass forming an absorber of optical flux; actuation electrodes configured to set the mobile mass in vibration and arranged laterally relative to the mobile mass; and detection electrodes to detect variation in vibration frequency of the mobile mass arranged laterally relative to the mobile mass.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.