Transporting device for substrate of liquid crystal display and using method thereof
US9401292B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2013 |
| Grant date | Jul 26, 2016 |
| Priority date | — |
| Expiry date | Dec 14, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transporting device for transporting substrate of liquid crystal display and using method thereof are provided. The transporting device comprises a fixing arm, at least two forks mounted on the fixing arm, laser emitting devices respectively mounted on the forks that are used to carry two ends of the substrate, laser sensors mounted on the fixing arm and corresponding to the laser emitting devices, a processor mounted on the fixing arm and connected to the laser sensors, and air damping devices mounted below the forks that are used to carry two ends of the substrate. The droop amount and the vibration of the fork can be measured when the transporting device is carrying a substrate, and it can be determined whether the droop amount and the vibration are abnormal. If they are abnormal, the laser emitting device will be started up to alleviate the vibration of the fork.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.