Infrared detector made up of suspended bolometric micro-plates
US9401377B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 23, 2012 |
| Grant date | Jul 26, 2016 |
| Priority date | — |
| Expiry date | May 6, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F71/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An array bolometric detector for detecting an electromagnetic radiation in a predetermined infrared or terahertz wavelength range, including a substrate, and an array of bolometric microplates for the detection of the radiation, suspended above the substrate by support elements. The detector includes a membrane arranged above each microplate, and having patterns having a refractive index smaller than that of the membrane formed therein. The patterns are placed periodically along at least one axis of the membrane, according to a period shorter than or equal towhere λ is a wavelength to be detected and n is the average refractive index of the medium separating the microplate from the membrane. The width of the patterns along the axis increases from a central location of the membrane towards the periphery thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.