Electromechanical transducing device and manufacturing method thereof, and liquid droplet discharging head and liquid droplet discharging apparatus
US9401471B2 · kind B2 · utility
6Cited by
25References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 5, 2011 |
| Grant date | Jul 26, 2016 |
| Priority date | — |
| Expiry date | Oct 15, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14491
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A manufacturing method of an electromechanical transducing device includes forming a vibration plate on a substrate; forming a first electrode made of a metal on the vibration plate; forming a second electrode made of an electrically conductive oxide on the first electrode; coating a surface modification material and carrying out surface modification of only the first electrode; forming an electromechanical transducing film on the second electrode; and forming a third electrode made of an electrically conductive oxide on the electromechanical transducing film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.