Acoustic resonator having collar structure
US9401692B2 · kind B2 · utility
28Cited by
47References
46Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 29, 2012 |
| Grant date | Jul 26, 2016 |
| Priority date | — |
| Expiry date | Jun 2, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/173
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic wave (BAW) resonator structure comprises a first electrode disposed over a substrate, a first piezoelectric layer disposed over the first electrode, a second electrode disposed over the first piezoelectric layer, and a collar structure disposed around a perimeter of an active region defined by an overlap between the first electrode, the second electrode, and the piezoelectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.