Patent · US Active

MEMS device having a microphone structure, and method for the production thereof

US9403670B2 · kind B2 · utility

45Cited by

9References

4Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Christoph Schelling · Stuttgart, DE
Stefan Singer · Vaterstetten, DE
Jochen Zoellin · Memmingen, DE

Key dates

Filing date	Jul 9, 2014
Grant date	Aug 2, 2016
Priority date	—
Expiry date	Aug 7, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A microphone structure of an MEMS device has a layer construction including: a base substrate; a deflectable microphone diaphragm at least partly spanning a through-opening in the substrate; a deflectable electrode of a microphone condenser system; a stationary counter-element having ventilation openings situated in the layer construction over the microphone diaphragm and acting as a bearer for a stationary electrode of the microphone condenser system. The diaphragm is bonded into the layer construction on the substrate via a flexible beam. The otherwise free edge region of the diaphragm is curved in a pan shape, so that it extends both vertically and also in some regions laterally beyond the edge region of the through-opening, and the edge region of the through-opening forms a lower stop for the diaphragm movement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.