Handler provided with a temperature control unit
US9404693B2 · kind B2 · utility
1Cited by
32References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2013 |
| Grant date | Aug 2, 2016 |
| Priority date | — |
| Expiry date | Oct 13, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2868
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A handler includes first and second cooling channels, and first and second supply channels. The first and second cooling channels correspond to housing pockets that are respectively heated by heaters. A first throttle valve controls the flow of refrigerant such that the amount of refrigerant flowing through the second cooling channel is larger than the amount of the refrigerant flowing through the first cooling channel. Temperature sensors detect the temperature of the respective housing pockets, and a control device controls the valve and the heaters so that a target temperature is maintained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.