Supersensitive linear pressure transducer
US9408555B2 · kind B2 · utility
3Cited by
14References
6Claims
0Family size
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Inventors
Key dates
| Filing date | Jun 30, 2011 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Jun 11, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2201/003
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
Apparatus and methods for a MEMS-fabricated variable capacitor. In one embodiment the capacitor is a comb drive comprising a plurality of plates interdigitated with a corresponding blades. As the plates move relative to the blades, the capacitance of the sensor changes. The capacitor is sufficiently sensitive to measure respiratory pressure in an animal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.