Ingot growing apparatus
US9410264B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 2015 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Apr 30, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/06
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An ingot growing apparatus. A main chamber includes a crucible accommodating a source material therein and a heater melting the source material by heating the crucible. A dome chamber is disposed on top of the crucible. A pull chamber is disposed on top of the dome chamber. An ingot grown in the crucible moves via a seed cable within the dome chamber and the pull chamber. A weight-measuring unit is disposed on top of the pull chamber. The weight-measuring unit includes a housing disposed on top of the pull chamber, with the interior thereof being maintained in a vacuum state, a support roller disposed within the housing to support the seed cable, and a load cell disposed outside of the housing to measure a weight of the ingot supported by the support roller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.