System and method for providing a self validating mass flow controller or a mass flow meter utilizing a software protocol
US9410834B2 · kind B2 · utility
0Cited by
3References
20Claims
0Family size
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Key dates
| Filing date | Mar 4, 2013 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | May 25, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed embodiments include a method, apparatus, and computer program product for verifying a performance of a mass flow controller or mass flow meter on a tool. For example, the disclosed embodiments include a method and a mass flow controller configured to perform, in-situ, by the mass flow controller, a rate of decay measurement during on-line operation of the tool to identify valve leak issues and/or for performing a flow measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.