Miniaturized photoacoustic spectrometer
US9410931B1 · kind B1 · utility
1Cited by
7References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2013 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Oct 18, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N29/2425
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A low-power miniaturized photoacoustic sensor uses an optical microphone made by semiconductor fabrication techniques, and optionally allows for all-optical communication to and from the sensor. This allows integration of the photoacoustic sensor into systems with special requirements, such as those that would be reactive in an electrical discharge condition. The photoacoustic sensor can also be operated in various other modes with wide application flexibility.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.