Patent · US Active

Contactless capacitive distance sensor

US9410999B2 · kind B2 · utility

1Cited by

4References

32Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Fatih Alatas · Munich, DE
Martin Kördel · Charlotte, US
Anton Schick · Taufkirchen, DE

Key dates

Filing date	Aug 2, 2012
Grant date	Aug 9, 2016
Priority date	—
Expiry date	Jul 7, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/312
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Electrically conductive structures produced on or in a substrate, or produced such that the structures are floating in a substrate undergo simple and reliable capacitive contactless and non-destructive inspection using a capacitive sensor having at least two sensor electrode surfaces which are arranged at different constant distances from one another parallel to a surface of the substrate and are arranged beside one another relative to the surface of the substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.