Magnetic field sensing element combining a circular vertical hall magnetic field sensing element with a planar hall element
US9411023B2 · kind B2 · utility
11Cited by
51References
24Claims
0Family size
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Key dates
| Filing date | Nov 21, 2014 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Nov 21, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N52/101
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetic field sensor includes a circular vertical Hall (CVH) sensing element and at least one planar Hall element. The CVH sensing element has contacts arranged over a common implant region in a substrate. In some embodiments, the at least one planar Hall element is formed as a circular planar Hall (CPH) sensing element also having contacts disposed over the common implant region. A CPH sensing element and a method of fabricating the CPH sensing element are separately described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.