Oxide capacitor electro-optical phase shifter
US9411176B2 · kind B2 · utility
4Cited by
3References
10Claims
0Family size
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Key dates
| Filing date | Sep 22, 2014 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Sep 22, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/212
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electro-optical phase shifter to be located in an optical waveguide may include a rib of a semiconductor material extending along a length of the optical waveguide and a control structure configured to modify a concentration of carriers in the rib according to a control voltage present between first and second control terminals of the phase shifter. The control structure may include a conductive layer covering a portion of the rib and electrically connected to a first of the control terminals. An insulating layer may be configured to electrically isolate the conductive layer from the rib.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.