Vacuum pump controller
US9411341B2 · kind B2 · utility
0Cited by
2References
20Claims
0Family size
Inventors
Key dates
| Filing date | May 23, 2013 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Jun 9, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67276
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum pump controller and a method of making a devise using the same are presented. The vacuum pump controller comprises detectors for detecting whether a cassette is present in a semiconductor processing load lock; and controllers for sending control signals to a vacuum pump to control the speed voltage of the vacuum pump. The vacuum pump controller may further send control signals to control the supply of N2/H2 gas, cooling water and other vacuum pump accessories.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.