Methods for forming a nanowire and apparatus thereof
US9412442B2 · kind B2 · utility
2Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2012 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Jan 30, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K10/484
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A system that incorporates teachings of the subject disclosure may include, for example, a method for depositing a first material that substantially covers a nanoheater, applying a signal to the nanoheater to remove a first portion of the first material covering the nanoheater to form a trench aligned with the nanoheater, depositing a second material in the trench, and removing a second portion of the first material and a portion of the second material to form a nanowire comprising a remaining portion of the second material covering the nanoheater along the trench. Additional embodiments are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.