Baseplate supporting pin and baseplate supporting device using the same
US9414439B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Mar 19, 2013 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Dec 9, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
According to embodiments of present invention, a baseplate supporting pin is provided, which comprises: a pin body; a heating device embedded into the pin body; and a first control unit electrically connected to the heating device for controlling the heating device. Furthermore, according to embodiments of present invention, a baseplate supporting device is provided, which comprises: a baseplate support member; and a baseplate supporting pin, provided to ascend or descend through an opening formed in the baseplate supporting plate so as to support the baseplate thereon or place the baseplate on the baseplate support member, wherein the baseplate supporting pin comprises: a pin body; a heating device built in the pin body; and a first control unit electrically connected to the heating device for controlling the heating device. The baseplate supporting pin and the baseplate supporting device facilitate eliminating adverse effect caused by uneven heating of the baseplate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.