Biosensing well array with protective layer
US9417209B2 · kind B2 · utility
22Cited by
2References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 2015 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | May 10, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides a biological field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET includes a microwells having a sensing layer, a top metal stack under the sensing layer, and a multi-layer interconnect (MLI) under the top metal stack. The top metal stack includes a top metal and a protective layer over and peripherally surrounding the top metal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.