Atomic layer deposition inverted passivated surface acoustic wave sensor for early detection of biofilm growth
US9417216B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 16, 2014 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | Feb 16, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0423
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface acoustic wave (SAW) biofilm sensor includes a transmitting electric to acoustic wave transducer defining an upper surface and a lower surface, a receiving acoustic wave to electric transducer defining an upper surface and a lower surface, a piezoelectric film layer defining an upper surface and a lower surface, and a passivation film layer defining an upper surface and a lower surface. Portions of the lower surface of the piezoelectric film layer are disposed on the upper surface of the transmitting electric to acoustic wave transducer and on the upper surface of the receiving acoustic wave to electric transducer, and the lower surface of the passivation film layer is disposed on the upper surface of the piezoelectric film layer such that the upper surface of the passivation film layer is configured to enable contact with a biofilm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.