Patent · US Active

Atomic referenced optical accelerometer

US9417261B2 · kind B2 · utility

5Cited by
17References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 23, 2014
Grant dateAug 16, 2016
Priority date
Expiry dateOct 19, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01P15/131
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

In some examples, a micro-electro-mechanical system (MEMS) optical accelerometer includes a housing comprising an internal chamber that includes a Fabry-Perot cavity and a proof mass affixed to the housing via one or more elastic elements, a light source configured to emit radiation, a first detector configured to receive radiation transmitted through the Fabry-Perot cavity and configured to generate one or more signals that indicate a position of the proof mass. The MEMS optical accelerometer further comprises an atomic wavelength reference and a second detector configured to detect radiation transmitted through the atomic wavelength reference and configured to generate one or more signals that indicate a wavelength of the radiation emitted by the light source, and a servomechanism electrically coupled to the second photo detector and the light source, configured to adjust the light source to maintain the radiation emitted by the light source at approximately a selected wavelength.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.