Array sensor apparatus and forming method thereof
US9419162B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 23, 2014 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | Sep 23, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F77/334
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An array sensor apparatus and forming method thereof, wherein the array sensor comprises: a driving circuit and a sensor circuit, wherein the driving circuit and the sensor circuit are formed on the same substrate surface, the sensor circuit comprises a pixel cell array including pixel cells and driving lines connected with the pixel cells, output ends of the driving circuit are connected to the driving lines of the sensor circuit, the driving circuit comprises a first transistor, and the pixel cell comprises a second transistor. In the array sensor apparatus of the present disclosure, the driving circuit and the sensor circuit are formed on the same substrate surface, thus occupying less area. Reliability may be improved. Besides, the forming processes can be implemented simultaneously without additional processing steps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.