Magnetic sensor and method of fabricating the same
US9419206B2 · kind B2 · utility
1Cited by
2References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2013 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | Jul 25, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N52/101
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are a magnetic sensor and a method of fabricating the same. The magnetic sensor includes: hall elements disposed in a substrate, a protection layer disposed on the substrate, a seed layer disposed on the protection layer, and an integrated magnetic concentrator (IMC) formed on the seed layer, the seed layer and the IMC each having an uneven surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.