Nano- and micro-electromechanical resonators
US9419583B2 · kind B2 · utility
16Cited by
1References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2015 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | Dec 15, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/241
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A resonator includes a piezoelectric plate and interdigitated electrode(s). The interdigitated electrode includes a plurality of conductive strips disposed over a top surface of the piezoelectric plate. A two-dimensional mode of mechanical vibration is excited in a cross sectional plane of the piezoelectric plate in response to an alternating voltage applied through the interdigitated electrode. The two-dimensional mode of mechanical vibration is a cross-sectional Lamé mode resonance (CLMR) or a degenerate cross-sectional Lamé mode resonance (dCLMR).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.