Patent · US Active

Vacuum pump

US9422937B2 · kind B2 · utility

0Cited by

5References

18Claims

0Family size

Assignee

Pleiffer Vacuum GmbH · DE

Inventors

Aleksandr Shirinov · Wetzlar, DE
Tobias Stoll · Steffenberg, DE
Michael Schweighoefer · Schönberg (Holstein), DE
Jan Hofmann · Hamburg, DE

Key dates

Filing date	Feb 14, 2013
Grant date	Aug 23, 2016
Priority date	—
Expiry date	Apr 21, 2035

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF04D23/008
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.