Patent · US Active

System having a process chamber for workpieces

US9423179B2 · kind B2 · utility

8Cited by

11References

26Claims

0Family size

Assignee

Duerr Systems AG · DE

Inventors

Dietmar Wieland · Waiblingen, DE
Oliver Iglauer · Stuttgart, DE
Christof Knuesel · Munich, DE
Marius Winkler · Pleidelsheim, DE

Key dates

Filing date	Apr 26, 2013
Grant date	Aug 23, 2016
Priority date	—
Expiry date	Jun 26, 2033

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF26B2210/12
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

The invention relates to an installation having a process chamber which comprises an inner space having a receiving region for workpieces. The process chamber has an opening for the supply or discharge of workpieces. The process chamber is constructed so as to have a device for the introduction of gaseous fluid into the inner space, which device has at least one nozzle or aperture for the production of a fluid stream curtain between the opening and the receiving region for workpieces. The process chamber has a device for supplying fresh air, with which device fresh air can be introduced into the receiving region at a side of the fluid stream curtain, which side faces away from the opening.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.