Device for detecting at least one gaseous analyte and method for the production thereof
US9423377B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2015 |
| Grant date | Aug 23, 2016 |
| Priority date | — |
| Expiry date | Nov 18, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4143
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for detecting at least one gaseous analyte comprises a detection section including a semiconductor substrate and at least one sensor element, which is arranged on the semiconductor substrate. The at least one sensor element includes two electrodes and a solid electrolyte layer arranged between the electrodes. The device also comprises a protective cap configured to cover the at least one sensor element, and at least one temperature-control unit configured for temperature control of the protective cap. The at least one temperature-control unit is arranged on the protective cap. The protective cap is formed from a semiconductor material. The device further comprises a diffusion section having a plurality of passage openings for the gaseous analyte arranged at least in a partial section of the protective cap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.