Patent · US Active

Device for detecting at least one gaseous analyte and method for the production thereof

US9423377B2 · kind B2 · utility

1Cited by
2References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 18, 2015
Grant dateAug 23, 2016
Priority date
Expiry dateNov 18, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N27/4143
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A device for detecting at least one gaseous analyte comprises a detection section including a semiconductor substrate and at least one sensor element, which is arranged on the semiconductor substrate. The at least one sensor element includes two electrodes and a solid electrolyte layer arranged between the electrodes. The device also comprises a protective cap configured to cover the at least one sensor element, and at least one temperature-control unit configured for temperature control of the protective cap. The at least one temperature-control unit is arranged on the protective cap. The protective cap is formed from a semiconductor material. The device further comprises a diffusion section having a plurality of passage openings for the gaseous analyte arranged at least in a partial section of the protective cap.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.