Localized deposition of polymer film on nanocantilever chemical vapor sensors by surface-initiated atom transfer radical polymerization
US9423387B2 · kind B2 · utility
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Key dates
| Filing date | Mar 14, 2012 |
| Grant date | Aug 23, 2016 |
| Priority date | — |
| Expiry date | Feb 21, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N9/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Cantilever chemical vapor sensors that can be tailored to respond preferentially in frequency by controlling the location of deposition of an adsorbing layer. Cantilever chemical vapor sensor having a base, one or more legs and a tip are fabricated using a gold layer to promote deposition of a sorbing layer of a polymeric material in a desired location, and using a chromium layer to inhibit deposition of the sorbing layer in other locations. Sorbing layers having different glass temperatures Tg and their effects are described. The methods of making such cantilever chemical vapor sensors are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.