Patent · US Active

Lens module comprising at least one exchangeable optical element

US9423695B2 · kind B2 · utility

0Cited by

3References

26Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Guido Soyez · Ludwigsburg, DE
Stephan Back · Langenau, DE
Joachim Buechele · Lauchheim, DE
Julian Kaller · Oberkochen, DE
Guido Limbach · Aalen, DE
Harald Woelfle · Waldkirch, DE

Key dates

Filing date	Jan 26, 2015
Grant date	Aug 23, 2016
Priority date	—
Expiry date	Jan 26, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70933
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical system has a housing with a mount and an opening to a receiving region, the receiving region being located within the housing and including the mount. At least one optical element is inserted into and removed from the receiving region through the opening, and at least one gas supply device provides a flow of gas in the receiving region. An associated method of inserting or removing an optical element into or from a receiving region in a housing is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.