Method for producing a solar cell

US9425333B2 · kind B2 · utility

Assignee

• Institutt for Energiteknikk · NO

Inventors

• Krister Mangersnes · Stavanger, NO
• Sean Erik Foss · Skedsmokorset, NO

Key dates

• Filing date: Oct 25, 2011
• Grant date: Aug 23, 2016
• Expiry date: Mar 14, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02E10/50
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A device including a surface layer of a selected material in a predetermined pattern on a substrate surface. A groove or ridge arranged in the substrate surface includes a bottom or top face, respectively, and at least one side face sloping relative to the bottom or top face. The surface layer is deposited on a part of the substrate including the groove or ridge by vacuum chamber sputtering the selected material from a sputtering source while moving the substrate past the sputtering source in a direction substantially perpendicular to a sputtering main lobe direction and with a normal to the substrate surface substantially in a predefined angle with the main lobe direction. By uniformly etching away surface layer material deposited on the substrate by the sputtering until freeing a substantial part of the side face, the predetermined pattern becomes defined substantially by the bottom face or the top face.