Vibration driven power generation element and method of manufacture thereof
US9425709B2 · kind B2 · utility
19Cited by
2References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2013 |
| Grant date | Aug 23, 2016 |
| Priority date | — |
| Expiry date | May 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D48/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A vibration driven power generation element according to the present invention includes: a three dimensionally shaped movable comb tooth electrode comprising a plurality of comb teeth of which interiors are filled with an insulating material, and having an SiO2 layer into which alkali ions are injected provided upon its outer surface; and a fixed type comb tooth electrode provided with a plurality of comb teeth made from Si the interiors of which are doped so as to have low electrical resistance, being arranged with the three dimensionally shaped movable comb tooth electrode opposed thereto and interleaved thereinto.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.