Patent · US Active

Method of introducing a structure in a substrate

US9427885B2 · kind B2 · utility

1Cited by

12References

54Claims

0Family size

Assignee

picoDrill SA · CH

Inventors

Christian Schmidt · Erfurt, DE
Leander DITTMANN · Lausanne, CH
Enrico Stura · Neuchâtel, CH

Key dates

Filing date	Dec 2, 2009
Grant date	Aug 30, 2016
Priority date	—
Expiry date	Nov 29, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/24273
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

This invention relates to methods for the production of micro-structured substrates and their application in natural sciences and technology, in particular in semiconductor, microfluidic and analysis devices. It concerns a method of introducing a structure, such as a hole or cavity or channel or well or recess or a structural change by providing a controlled electrical discharge.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.