Ceramic barrier layers

US9428834B2 · kind B2 · utility

Assignee

• Osram OLED GMBH · DE

Inventors

• Karsten Heuser · Erlangen, DE
• Georg Wittmann · Herzogenaurach, DE
• Guenter Gieres · Kleinsendelbach, DE
• Ralph Paetzold · Roth, DE
• Debora Henseler · Erlangen, DE

Key dates

• Filing date: Jul 17, 2014
• Grant date: Aug 30, 2016
• Expiry date: Aug 25, 2034

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/44
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Forming an arrangement of two ceramic barrier layers (5, 10) on a polymeric substrate (1) includes the steps of applying a first ceramic barrier layer (5) on the substrate (1). The surface (5A) of the first barrier layer (5) is modified to introduce new nucleation sites on the surface of the first layer. A second ceramic barrier layer (10) is formed on the first barrier layer (5) using the new nucleation sites. The second ceramic barrier layer is deposited with independent nucleation sites such that a barrier stack of enhanced quality is formed.