Magnetically suspended and plane-drove vibration isolator
US9429209B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2014 |
| Grant date | Aug 30, 2016 |
| Priority date | — |
| Expiry date | Feb 19, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K41/0354
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A magnetically suspended and plane-drove vibration isolator with zero stiffness comprises an upper mounting plate, a lower mounting plate and a main body. A sleeve of the main body is lubricated and supported against the lower mounting plate by a magnetically suspended planar motor. A piston cylinder fitted in the sleeve is lubricated against the sleeve by a cylindrical air bearing surface. The angle degree of freedom between the upper mounting plate and the lower mounting plate is decoupled by a spherical air bearing. A position close-loop control system is formed to precisely control the relative position between the upper mounting plate and the lower mounting plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.