Optical module for surface inspection and surface inspection apparatus including the same
US9429525B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2015 |
| Grant date | Aug 30, 2016 |
| Priority date | — |
| Expiry date | Jul 6, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0683
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical module for surface inspection includes a first light source unit that illuminates a substrate with first light produced by a first light source and a first beam splitter that changes the path of the first light, a second light source unit that illuminates the substrate with second light polarized in a first direction, a direction of polarization changing unit that illuminates the substrate with the third light polarized in a second direction perpendicular to the first direction, and a detection unit that detects fourth light which is a product of the first light reflecting from the substrate, fifth light which is a product of the second light scattered from the substrate, and sixth light which is a product of the third light scattered from the substrate. The third light is produced by changing the direction of polarization of the second light reflected from the inspected substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.