Detection system and method for automatically adjusting gray scale
US9430976B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 13, 2013 |
| Grant date | Aug 30, 2016 |
| Priority date | — |
| Expiry date | Jul 23, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2320/0626
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A detection system and a method capable of automatically adjusting a gray scale are provided. The detection system includes a detection lens (1), wherein the detection lens (1) is configured to collect a mask alignment image (10) and a substrate alignment image (11) formed by images of a mask alignment mark (8) on a mask (6) and a substrate alignment mark (9) on the glass substrate (7); and an automatic filter device (4) provided in a light path in which the detection lens (1) forms the substrate alignment image (11), wherein the automatic filter device (4) comprises an automatic gray scale detection module (12), a control module (14) and a filter (13). The detection system and method capable of automatically adjusting a gray scale can automatically change the gray scale of the substrate alignment image (11), thereby to improve the automatization degree of the detection system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.