Sol-gel precursors and methods for making lead-based perovskite films
US9431598B2 · kind B2 · utility
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Key dates
| Filing date | Nov 6, 2007 |
| Grant date | Aug 30, 2016 |
| Priority date | — |
| Expiry date | Mar 27, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/8548
Abstract
A simple, economical sol-gel method was invented to produce thick and dense lead zirconate titanate (PZT) thin films that exhibit the stoichiometric chemical composition and unprecedented electrical and dielectric properties. The PZT films are the foundation of many microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) for micro/nano sensors and actuators applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.